Add：No.34, Ganbei Road, Ganjingzi, Dalian, China
Post Code：116031
Tel：0411—85961069
E-mail：gmy@gmgas.com
Fax：0411—86672406
website:www.gmgas.com
In order to meet emergent requirement of micro-electronics and optoelectronics, Guangming Institute took the lead to research dry way detoxication technology of SiH4、PH3、B2H6、AsH3、GeH4、Si2H6 hypertoxic gas and produce associated device. At present, equipment produced has been applied at IC production line.
